・Influence of interference is reduced by adopting the pyrolyzer with catalyst.
・New intelligent sensor equipped.
・Automatic flow rate adjusting function installed

Sampling method Suction type
Principle of detection Potentiostatic Electrolysis Method
Detection range 0 to 5 ppm (C4F6)(C5F8) 0 to 15 ppm (COS)
Alarm setpoints 1st 2 ppm / 2nd 4 ppm (C4F6)(C5F8) 1st 5 ppm / 2nd 10 ppm (COS)
Type of alarm Gas alarm / fault alarm
Display of alarm 1st : ALM1 lamp blinking or lighting (red)
2nd : ALM2 lamp blinking or lighting (red)
Explosion protected construction Non-explosion protection
CE marking EMC / LVD / RoHs
Power source 100 V to 240 VAC ±10%
Dimensions Approx. 180 (W) x 225 (H) x 285 (D) mm (excluding projections)
Weight Approx. 6.0 kg
Operating temperature range 20℃ to 40℃ (no sudden changes)
Operating humidity range 40 to 70 %RH (no condensation)
Target gas C4F6, COS