Target Gas:
C6H18NSi2, C2HF3CL2, C2H4O2, NH3, AsH3, C8H22N2Si, C8H22N2Si, Br2, CO, COF2, COS, CL2, CLF3, B2H6, C4H11N, CH2F2, C2H7N, Si2H6, C3H9N, F2, CH2O2, GeH4, C5H2O2F6, N2H4, H2, HBr, HCL, CHN, HF, HI, H2O2, H2Se, H2S, I2, CH5N, CH6Si, HNO3, NO2, NO, NF3, O2, O3, PH3, PF3, SiH4, SO2, C8H20O4Si, C3H9N, Si3H9N
